Virtual Coriolis-Force-Based Mode-Matching Micromachine-Optimized Tuning Fork Gyroscope without a Quadrature-Nulling Loop
Autor: | Yixuan Wu, Weizheng Yuan, Yanjun Xue, Honglong Chang, Qiang Shen |
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Jazyk: | angličtina |
Rok vydání: | 2023 |
Předmět: | |
Zdroj: | Micromachines, Vol 14, Iss 9, p 1704 (2023) |
Druh dokumentu: | article |
ISSN: | 14091704 2072-666X |
DOI: | 10.3390/mi14091704 |
Popis: | A VCF-based mode-matching micromachine-optimized tuning fork gyroscope is proposed to not only maximize the scale factor of the device, but also avoid use of an additional quadrature-nulling loop to prevent structure complexity, pick-up electrode occupation, and coupling with a mode-matching loop. In detail, a mode-matching, closed-loop system without a quadrature-nulling loop is established, and the corresponding convergence and matching error are quantitatively analyzed. The optimal straight beam of the gyro structure is then modeled to significantly reduce the quadrature coupling. The test results show that the frequency split is narrowed from 20 Hz to 0.014 Hz. The scale factor is improved 20.6 times and the bias instability (BI) is suppressed 3.28 times. The observed matching accuracy demonstrates that a mode matching system without a quadrature suppression loop is feasible and that the proposed device represents a competitive design for a mode-matching gyroscope. |
Databáze: | Directory of Open Access Journals |
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