| Autor: |
Simone Dolabella, Alexandre Reinhardt, Ausrine Bartasyte, Samuel Margueron, Amit Sharma, Xavier Maeder, Alex Dommann, Antonia Neels, Aurelio Borzì |
| Jazyk: |
angličtina |
| Rok vydání: |
2023 |
| Předmět: |
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| Zdroj: |
Materials & Design, Vol 231, Iss , Pp 112001- (2023) |
| Druh dokumentu: |
article |
| ISSN: |
0264-1275 |
| DOI: |
10.1016/j.matdes.2023.112001 |
| Popis: |
LiNbO3 (LNO) is a material suitable for high-frequency and wideband RF filters as well as photonic applications due to its outstanding piezoelectric and optical properties. Applications such as thin-film bulk acoustic wave resonators or highly confined electro-optic modulators require thin films, which are still challenging to be obtained with the necessary crystalline quality by deposition methods. Alternatively to deposition, crystal ion-slicing (CIS) or Smart CutTM enables obtaining thin films hundreds of nanometers thick from the bulk single-crystal utilizing high-energy and dose implantation of light atoms. The price to pay is the partial degradation of the initial crystalline perfection, which translates to a degradation of the piezoelectric performance of the material if the CIS-induced damage is not eliminated.This work aims to understand the physics of the recrystallization process of the CIS-damaged LNO crystal upon thermal annealing. The study of the coherent and diffuse scattering by high-resolution X-ray diffraction, complemented by micro-Raman backscattering spectroscopy and Transmission Electron Microscopy (TEM), allowed to study the recovery of the crystallinity from the CIS-induced lattice strain and stress and the progressive reduction of the defects clusters dimension. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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Full Text from ScienceDirect