Analytical Model for the Depth Progress during Laser Micromachining of V-Shaped Grooves

Autor: Daniel Holder, Rudolf Weber, Thomas Graf
Jazyk: angličtina
Rok vydání: 2022
Předmět:
Zdroj: Micromachines, Vol 13, Iss 6, p 870 (2022)
Druh dokumentu: article
ISSN: 2072-666X
DOI: 10.3390/mi13060870
Popis: An analytical model is presented that allows predicting the progress and the final depth obtained by laser micromachining of grooves in metals with ultrashort laser pulses. The model assumes that micromachined grooves feature a V-shaped geometry and that the fluence absorbed along the walls is distributed with a linear increase from the edge to the tip of the groove. The depth progress of the processed groove is recursively calculated based on the depth increments induced by successive scans of the laser beam along the groove. The experimental validation confirms the model and its assumptions for micromachining of grooves in a Ti-alloy with femtosecond pulses and different pulse energies, repetition rates, scanning speeds and number of scans.
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