| Autor: |
Käseberg Tim, Bodermann Bernd, Sturm Matthias, Wurm Matthias, Siefke Thomas, Siaudinyté Lauryna, Tranum Rømer Astrid, Hansen Poul-Erik |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
|
| Zdroj: |
EPJ Web of Conferences, Vol 309, p 02005 (2024) |
| Druh dokumentu: |
article |
| ISSN: |
2100-014X |
| DOI: |
10.1051/epjconf/202430902005 |
| Popis: |
In the pursuit of closing the gap between nanometrology and nanofabrication, we investigate the use of advanced optical far field methods for sub-wavelength parameter reconstruction. With the goal of establishing a hybrid evaluation scheme connecting different methods and including different information channels, we performed comparison measurements on a silicon line grating sample with buried as well as not buried surface relief lines. To this end, the results of our measurement are in good agreements with each other, and the collected structure data is feasible to be used for hybrid evaluation. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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