| Autor: |
Masoud Akbari, Hamza Mouharrar, Chiara Crivello, Martial Defoort, Eihab Abdel-Rahman, Skandar Basrour, Kevin Musselman, David Muñoz-Rojas |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
|
| Zdroj: |
APL Materials, Vol 12, Iss 6, Pp 061119-061119-8 (2024) |
| Druh dokumentu: |
article |
| ISSN: |
2166-532X |
| DOI: |
10.1063/5.0206295 |
| Popis: |
A gas-phase technique, known as chemical vapor deposition of metal-organic frameworks (MOF-CVD), is used for sensitizing silicon cantilevers. These cantilevers are coated with a uniform and compact Zn(EtIm)2 (MAF-6) film, enabling the detection of volatile organic compounds (VOCs) through a change in the resonance frequency of the cantilever. The MOF-coated sensor exhibits remarkable sensitivity to VOCs within the 0.33–0.71 Hz/ppm range and a limit of detection (LOD) spanning from 4 to 9 ppb. Notably, these sensitivities surpass those achieved by ZnO-coated cantilevers by two orders of magnitude. This high sensitivity is attributed to the high porosity and large surface area of MAF-6. The approach employed in this work is compatible with conventional microfabrication techniques and offers an advantageous avenue for the development of highly sensitive gas sensors. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
|
