| Autor: |
Michał Krysztof |
| Jazyk: |
angličtina |
| Rok vydání: |
2021 |
| Předmět: |
|
| Zdroj: |
Microsystems & Nanoengineering, Vol 7, Iss 1, Pp 1-9 (2021) |
| Druh dokumentu: |
article |
| ISSN: |
2055-7434 |
| DOI: |
10.1038/s41378-021-00268-9 |
| Popis: |
Abstract This article presents a field-emission electron gun intended for use in a MEMS (microelectromechanical system) electron microscope. Its fabrication process follows the technology of a miniature device under development built from silicon electrodes and glass spacers. The electron gun contains a silicon cathode with a single very sharp protrusion and a bundle of disordered CNTs deposited on its end (called a sharp silicon/CNT cathode). It was tested in diode and triode configurations. For the diode configuration, a low threshold voltage |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
|
