Piezoelectric Analysis of Saw Sensor Using Finite Element Method

Autor:	Vladimír KUTIŠ, Gabriel GÁLIK, Ivan RÝGER, Justín MURÍN, Juraj HRABOVSKÝ, Juraj PAULECH, Tibor LALINSKÝ
Jazyk:	angličtina
Rok vydání:	2013
Předmět:	SAW sensor MEMS piezoelectric material FEM analysis modal analysis transient analysis Mechanical engineering and machinery TJ1-1570
Zdroj:	Transactions of the VŠB-Technical University of Ostrava, Mechanical Series, Vol 59, Iss 1, Pp 33-38 (2013)
Druh dokumentu:	article
ISSN:	1210-0471 1804-0993
DOI:	10.22223/tr.2013-1/1932
Popis:	In this contribution modeling and simulation of surface acoustic waves (SAW) sensor using finite element method will be presented. SAW sensor is made from piezoelectric GaN layer and SiC substrate. Two different analysis types are investigated - modal and transient. Both analyses are only 2D. The goal of modal analysis, is to determine the eigenfrequency of SAW, which is used in following transient analysis. In transient analysis, wave propagation in SAW sensor is investigated. Both analyses were performed using FEM code ANSYS.
Databáze:	Directory of Open Access Journals
Externí odkaz:	https://doaj.org/article/0879316c98c9414a8cf2cb6ac761834f Zobrazit plný text záznamu View record in DOAJ