| Autor: |
Yanming Zhang, Zhen Zhang, Yi Zhang, Denghua Liu, Jie Wu, Yu Huang, Guojun Zhang |
| Jazyk: |
angličtina |
| Rok vydání: |
2021 |
| Předmět: |
|
| Zdroj: |
Journal of Advanced Research, Vol 30, Iss , Pp 39-51 (2021) |
| Druh dokumentu: |
article |
| ISSN: |
2090-1232 |
| DOI: |
10.1016/j.jare.2020.12.005 |
| Popis: |
Introduction: Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation. Objectives: In order to improve characteristics and stability of induced plasma, this paper proposed magnetically controlled LIPMM (MC-LIPMM) to achieve a good performance of processing single-crystal silicon which is widely used in solid state electronics and infrared optical applications. Methods: A comprehensive study on surface integrity and geometrical shape was conducted based on the experimental method. Firstly, the mechanism of MC-LIPMM including laser-plasma, laser-materials interactions and transport effects was theoretically analyzed. Then a series of experiments was conducted to completely investigate the effect of magnetic field intensity, pulse repetition frequency, and bubble behavior on surface integrity and geometrical shape of micro channels. Results: It revealed that magnetic field contributed to maximum reduction of 12.64% for heat affected zone and 62.57% for width while maximum increase of 26.23% for depth and 90.26% for aspect ratio. Conclusion: This research confirms that MC-LIPMM can improve the machining characteristics of silicon materials and cavitation bubbles shows an apparently negative impact on the surface morphology. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
|
