| Autor: |
Vlasova M., Aguilar Márquez P.A., Reséndiz-González M.C., Kakazey M., Stetsenko V., Tomila T., Ragulya A. |
| Jazyk: |
angličtina |
| Rok vydání: |
2008 |
| Předmět: |
|
| Zdroj: |
Science of Sintering, Vol 40, Iss 1, Pp 69-78 (2008) |
| Druh dokumentu: |
article |
| ISSN: |
0350-820X |
| DOI: |
10.2298/SOS0801069V |
| Popis: |
Using electron microscopy, atomic force microscopy, X-ray microanalysis, and IR spectroscopy, it was established that, in the regime of continuous laser irradiation of silicon at P = 170 W in different gaseous atmospheres with an oxygen impurity, SiOx composite films with a complex morphology form. The main components of ablation products are clusters that form during flight of ablation products and as a result of separation of SiOx-clusters from the zone of the irradiation channel. The roughness and density of the films depend on the heating temperature of the target surface and the type of deposited clusters. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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