Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure

Autor: Zengling Ran, Shan Liu, Qin Liu, Ya Huang, Haihong Bao, Yanjun Wang, Shucheng Luo, Huiqin Yang, Yunjiang Rao
Jazyk: angličtina
Rok vydání: 2014
Předmět:
Zdroj: Sensors, Vol 14, Iss 8, Pp 14330-14338 (2014)
Druh dokumentu: article
ISSN: 1424-8220
DOI: 10.3390/s140814330
Popis: Laser-machined microcavities for simultaneous measurement of high-temperature and high-pressure are demonstrated. These two cascaded microcavities are an air cavity and a composite cavity including a section of fiber and an air cavity. They are both placed into a pressure chamber inside a furnace to perform simultaneous pressure and high-temperature tests. The thermal and pressure coefficients of the short air cavity are ~0.0779 nm/°C and ~1.14 nm/MPa, respectively. The thermal and pressure coefficients of the composite cavity are ~32.3 nm/°C and ~24.4 nm/MPa, respectively. The sensor could be used to separate temperature and pressure due to their different thermal and pressure coefficients. The excellent feature of such a sensor head is that it can withstand high temperatures of up to 400 °C and achieve precise measurement of high-pressure under high temperature conditions.
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