| Autor: |
Liang Zhao, Kaiping Feng, Binghai Lyu, Tianchen Zhao, Zhaozhong Zhou |
| Jazyk: |
angličtina |
| Rok vydání: |
2022 |
| Předmět: |
|
| Zdroj: |
Applied Sciences, Vol 12, Iss 24, p 12949 (2022) |
| Druh dokumentu: |
article |
| ISSN: |
2076-3417 |
| DOI: |
10.3390/app122412949 |
| Popis: |
This paper proposes a gel-formed abrasive tool to address the problem of abrasive agglomeration in a traditional hot-pressing abrasive tool. The effect of Polyimide resin content on the mechanical properties of the gel abrasive tools were tested, and a comparison of the mechanical properties of the gel abrasive tool and the hot-pressing tool was conducted. An orthogonal experiment was conducted to explore the best combination of machining parameters. A polishing experiment of sapphire was conducted to compare the processing effect of the gel abrasive tool and hot-pressing tool. The results from testing the mechanical properties showed that the tensile, flexural, and impact strength of the gel abrasive tool was better than that of the hot-pressing abrasive tool. The results of the orthogonal experiment showed that the best process parameters of the gel abrasive tool were a spindle speed of 900 rpm, a feed rate of 8 μm/min, and a grinding depth of 16 μm. The polishing experiment showed that the gel abrasive tool had a better processing effect on sapphire. The sapphire surface processed by the gel abrasive tool had no deep scratches, and an ultrasmooth surface could be obtained after chemical mechanical polishing (CMP). |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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