Hole Injection Effect and Dynamic Characteristic Analysis of Normally Off p-GaN HEMT with AlGaN Cap Layer on Low-Resistivity SiC Substrate

Autor: Hsiang-Chun Wang, Chia-Hao Liu, Chong-Rong Huang, Hsien-Chin Chiu, Hsuan-Ling Kao, Xinke Liu
Jazyk: angličtina
Rok vydání: 2022
Předmět:
Zdroj: Micromachines, Vol 13, Iss 5, p 807 (2022)
Druh dokumentu: article
ISSN: 2072-666X
DOI: 10.3390/mi13050807
Popis: A p-GaN HEMT with an AlGaN cap layer was grown on a low resistance SiC substrate. The AlGaN cap layer had a wide band gap which can effectively suppress hole injection and improve gate reliability. In addition, we selected a 0° angle and low resistance SiC substrate which not only substantially reduced the number of lattice dislocation defects caused by the heterogeneous junction but also greatly reduced the overall cost. The device exhibited a favorable gate voltage swing of 18.5 V (@IGS = 1 mA/mm) and an off-state breakdown voltage of 763 V. The device dynamic characteristics and hole injection behavior were analyzed using a pulse measurement system, and Ron was found to increase and VTH to shift under the gate lag effect.
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