Microstructure and Dielectric Properties of LPCVD/CVI-SiBCN Ceramics Annealed at Different Temperatures
Autor: | Jianping Li, Mingxi Zhao, Yongsheng Liu, Nan Chai, Fang Ye, Hailong Qin, Laifei Cheng, Litong Zhang |
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Jazyk: | angličtina |
Rok vydání: | 2017 |
Předmět: |
siliconboron carbonitride ceramic
dielectric properties electromagnetic wave absorbing properties heat treatment chemical vapor deposition and infiltration Technology Electrical engineering. Electronics. Nuclear engineering TK1-9971 Engineering (General). Civil engineering (General) TA1-2040 Microscopy QH201-278.5 Descriptive and experimental mechanics QC120-168.85 |
Zdroj: | Materials, Vol 10, Iss 6, p 655 (2017) |
Druh dokumentu: | article |
ISSN: | 1996-1944 |
DOI: | 10.3390/ma10060655 |
Popis: | SiBCN ceramics were introduced into porous Si3N4 ceramics via a low-pressure chemical vapor deposition and infiltration (LPCVD/CVI) technique, and then the composite ceramics were heat-treated from 1400 °C to 1700 °C in a N2 atmosphere. The effects of annealing temperatures on microstructure, phase evolution, dielectric properties of SiBCN ceramics were investigated. The results revealed that α-Si3N4 and free carbon were separated below 1700 °C, and then SiC grains formed in the SiBCN ceramic matrix after annealing at 1700 °C through a phase-reaction between free carbon and α-Si3N4. The average dielectric loss of composites increased from 0 to 0.03 due to the formation of dispersive SiC grains and the increase of grain boundaries. |
Databáze: | Directory of Open Access Journals |
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