| Autor: |
Isabella Peracchi, Carsten Richter, Tobias Schulz, Jens Martin, Albert Kwasniewski, Sebastian Kläger, Christiane Frank-Rotsch, Patrick Steglich, Karoline Stolze |
| Jazyk: |
angličtina |
| Rok vydání: |
2023 |
| Předmět: |
|
| Zdroj: |
Crystals, Vol 13, Iss 7, p 1126 (2023) |
| Druh dokumentu: |
article |
| ISSN: |
2073-4352 |
| DOI: |
10.3390/cryst13071126 |
| Popis: |
New requirements for high-frequency applications in wireless communication and sensor technologies need III-V compound semiconductors such as indium phosphide (InP) to complement silicon (Si)-based technologies. This study establishes the basis for a new approach to heterogeneous integration of III-V on Si aimed at the transfer of single-crystalline InP coupons on Si via micro-transfer printing (μTP). The InP coupons will act as high-quality virtual substrates that allow selective homo-epitaxy. We present the chemical-mechanical polishing-based preparation and structural characterization of µm-thin (001) InP platelets, starting from high-quality 4-inch bulk crystals and micro-patterning into transferable coupons of several hundred µm2. The obtained InP platelets exhibit the desired thickness—below 10 ± 1 µm—and low surface roughness— |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
|
