| Autor: |
Bowen Duan, Zhenyin Hai, Maocheng Guo, Yongqiu Zheng, Jiamin Chen, Jiandong Bai, Zhixuan Su, Rui Liang, Hongtian Zhu, Qi Zhang, Chenyang Xue |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
|
| Zdroj: |
Micromachines, Vol 15, Iss 2, p 174 (2024) |
| Druh dokumentu: |
article |
| ISSN: |
2072-666X |
| DOI: |
10.3390/mi15020174 |
| Popis: |
In the field of in situ measurement of high-temperature pressure, fiber-optic Fabry–Perot pressure sensors have been extensively studied and applied in recent years thanks to their compact size and excellent anti-interference and anti-shock capabilities. However, such sensors have high technological difficulty, limited pressure measurement range, and low sensitivity. This paper proposes a fiber-optic Fabry–Perot pressure sensor based on a membrane-hole-base structure. The sensitive core was fabricated by laser cutting technology and direct bonding technology of three-layer sapphire and develops a supporting large-cavity-length demodulation algorithm for the sensor’s Fabry–Perot cavity. The sensor exhibits enhanced sensitivity, a simplified structure, convenient preparation procedures, as well as improved pressure resistance and anti-harsh environment capabilities, and has large-range pressure sensing capability of 0–10 MPa in the temperature range of 20–370 °C. The sensor sensitivity is 918.9 nm/MPa, the temperature coefficient is 0.0695 nm/(MPa∙°C), and the error over the full temperature range is better than 2.312%. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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