Wafer-scale transfer route for top–down III-nitride nanowire LED arrays based on the femtosecond laser lift-off technique

Autor: Nursidik Yulianto, Andam Deatama Refino, Alina Syring, Nurhalis Majid, Shinta Mariana, Patrick Schnell, Ruri Agung Wahyuono, Kuwat Triyana, Florian Meierhofer, Winfried Daum, Fatwa F. Abdi, Tobias Voss, Hutomo Suryo Wasisto, Andreas Waag
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Zdroj: Microsystems & Nanoengineering, Vol 7, Iss 1, Pp 1-15 (2021)
Druh dokumentu: article
ISSN: 2055-7434
DOI: 10.1038/s41378-021-00257-y
Databáze: Directory of Open Access Journals