Si-integrated ultrathin films of phase-pure Y3Fe5O12 (YIG) via novel two-step rapid thermal anneal
| Autor: | Thomas E. Gage, Prabesh Dulal, Peter A. Solheid, David J. Flannigan, Bethanie J. H. Stadler |
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| Jazyk: | angličtina |
| Rok vydání: | 2017 |
| Předmět: | |
| Zdroj: | Materials Research Letters, Vol 5, Iss 6, Pp 379-385 (2017) |
| Druh dokumentu: | article |
| ISSN: | 2166-3831 21663831 |
| DOI: | 10.1080/21663831.2017.1295285 |
| Popis: | Traditional one-step annealing of ultrathin amorphous Y–Fe–O films on Si has been reported to yield ‘incomplete crystallization’. Here, it is shown that films produced by standard anneals (e.g.: 800°C, 3 min) actually contain yttrium iron garnet (YIG) crystallites in a nanocrystalline non-garnet matrix. During in situ TEM laser annealing, a low-temperature pre-anneal enabled subsequent YIG crystallization at velocities of 280 nm/s that prevented the formation of the nanocrystalline matrix. From these results, a two-step rapid thermal anneal was identified (400°C, 3 min; 800°C, 3 min) that successfully produces phase-pure garnet films on SiO2 on Si. |
| Databáze: | Directory of Open Access Journals |
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