Uncovering the origin of interface stress enhancement and compressive-to-tensile stress transition in immiscible nanomultilayers

Autor: Hu, Yang, Lorenzin, Giacomo, Yeom, Jeyun, Liyanage, Manura, Curtin, William A., Jeurgens, Lars P. H., Janczak-Rusch, Jolanta, Cancellieri, Claudia, Turlo, Vladyslav
Rok vydání: 2024
Předmět:
Druh dokumentu: Working Paper
Popis: The intrinsic stress in nanomultilayers (NMLs) is typically dominated by interface stress, which is particularly high in immiscible Cu/W NMLs. Here, atomistic simulations with a chemically-accurate neural network potential reveal the role of interfacial intermixing and metastable phase formation on the interface stress levels. These results rationalize an experimentally-reported compressive- to-tensile transition as a function of NML deposition conditions and the extremely high interface stresses under some conditions.
Databáze: arXiv