Photoinduced Patterning of Oxygen Vacancies to Promote the Ferroelectric Phase of $\mathrm{Hf_{0.5}Zr_{0.5}O_2}$
| Autor: | Beechem, Thomas E, Vega, Fernando, Jaszewski, Samantha T., Aronson, Benjamin L., Kelley, Kyle P., Ihlefeld, Jon F. |
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| Rok vydání: | 2024 |
| Předmět: | |
| Zdroj: | Appl. Phys. Lett. 124, 062902 (2024) |
| Druh dokumentu: | Working Paper |
| DOI: | 10.1063/5.0186481 |
| Popis: | Photoinduced reductions in the oxygen vacancy concentration were leveraged to increase the ferroelectric phase fraction of $\mathrm{Hf_{0.5}Zr_{0.5}O_2}$ (HZO) thin-films. Modest ($\sim 0.02-0.77~\mathrm{mJ/\mu m^2}$) laser doses of visible light (488 nm, 2.54 eV) spatially patterned the concentration of oxygen vacancies as monitored by photoluminescence imaging. Local, tip-based, near-field, nanoFTIR measurements showed that the photoinduced oxygen vacancy concentration reduction promoted formation of the ferroelectric phase (space group $Pca2_1$) resulting in an increase in the piezoelectric response measured by piezoresponse force microscopy. Photoinduced vacancy tailoring provides, therefore, a spatially prescriptive, post-synthesis, and low-entry method to modify phase in \hfo-based materials. Comment: 6 pages, 3 figures |
| Databáze: | arXiv |
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