CMOS-Compatible, AlScN-Based Integrated Electro-Optic Modulator
Autor: | Yoshioka, Valerie, Jin, Jicheng, Zhou, Haiqi, Tang, Zichen, Olsson III, Roy H., Zhen, Bo |
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Rok vydání: | 2024 |
Předmět: | |
Druh dokumentu: | Working Paper |
Popis: | Commercial production of integrated photonic devices is limited by scalability of desirable material platforms. We explore a relatively new photonic material, AlScN, for its use in electro-optic modulation. Its CMOS-compatibility could facilitate large-scale production of integrated photonic modulators, and it exhibits an enhanced second-order optical nonlinearity compared to intrinsic AlN, indicating the possibility for efficient modulation. Here, we measure the electro-optic effect in AlScN-based modulators, demonstrating $V_{\pi}L$ around 750 V$\cdot$cm. Since the electro-optic response is smaller than expected, we discuss potential causes for the reduced response and future outlook for AlScN-based photonics. Comment: 9 pages, 3 figures |
Databáze: | arXiv |
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