Thin-Film Lithium Niobate Acoustic Resonator with High Q of 237 and k2 of 5.1% at 50.74 GHz

Autor:	Kramer, Jack, Chulukhadze, Vakhtang, Huynh, Kenny, Barrera, Omar, Liao, Michael, Cho, Sinwoo, Matto, Lezli, Goorsky, Mark S., Lu, Ruochen
Rok vydání:	2023
Předmět:	Electrical Engineering and Systems Science - Signal Processing
Zdroj:	2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), Toyama, Japan, 2023
Druh dokumentu:	Working Paper
DOI:	10.1109/EFTF/IFCS57587.2023.10272149
Popis:	This work reports a 50.74 GHz lithium niobate (LiNbO3) acoustic resonator with a high quality factor (Q) of 237 and an electromechanical coupling (k2) of 5.17% resulting in a figure of merit (FoM, Q x k2) of 12.2. The LiNbO3 resonator employs a novel bilayer periodically poled piezoelectric film (P3F) 128 Y-cut LiNbO3 on amorphous silicon (a-Si) on sapphire stack to achieve low losses and high coupling at millimeter wave (mm-wave). The device also shows a Q of 159, k2 of 65.06%, and FoM of 103.4 for the 16.99 GHz tone. This result shows promising prospects of P3F LiNbO3 towards mm-wave front-end filters. Comment: 4 pages, 5 figures, published in 2023 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum (IEEE IFCS 2023)
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/2307.05742 Zobrazit plný text záznamu View this record from Arxiv