| Autor: |
Madhuri, Aishwarya, Jena, Sanketa, Gupta, Mukul, Swain, Bibhu Prasad |
| Rok vydání: |
2023 |
| Předmět: |
|
| Druh dokumentu: |
Working Paper |
| DOI: |
10.1016/j.physb.2023.415141 |
| Popis: |
In this work, the effect on crystallite orientation, surface morphology, fractal geometry, structural coordination and electronic environment of DC magnetron sputtered AlN films were investigated. X-ray diffraction results disclosed that the c-axis orientation of AlN films increased with the preferred wurtzite hexagonal structure above 17% N2 flow. X-ray reflectivity data confirmed AlN film density increased with increasing N2 flow and was found to be 3.18g/cm3 for 40% N2. The transition of electrons from N 1s to 2p states hybridized with Al 3p states because of {\pi}* resonance was obtained from X-ray absorption spectroscopy of the N K-edge. The semi-empirical coordination geometry of nitrogen atoms has been studied by deconvolution of N K-edge. The surface composition of AlN films at 40% N2 consists of 32.08, 51.94 and 15.97at.% Al, N and O respectively. Blue-shifting of A1(LO) and E1(LO) modes in the Raman spectra at phonon energies 800 and 1051cm-1 respectively was most likely due to the presence of oxygen bonds in the AlN films. |
| Databáze: |
arXiv |
| Externí odkaz: |
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