Scalable photonic crystal waveguides with 2 dB component loss
| Autor: | Xiao, Yahui, Wang, Feifan, Mao, Dun, Kananen, Thomas, Li, Tiantian, Lee, Hwaseob, Wang, Zi, Gu, Tingyi |
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| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | IEEE Photonics Technology Letters 34, no. 12 (2022): 637-640 |
| Druh dokumentu: | Working Paper |
| DOI: | 10.1109/LPT.2022.3175157 |
| Popis: | Periodic or gradient subwavelength structures are basic configurations of photonic crystals and metamaterials. The measured linear losses of those nanophotonic devices are well-beyond theoretical predictions. Nanofabrication related geometric inhomogeneity is considered as the primary cause of the deleterious performance. The deep-UV photolithography in CMOS foundry is a large-scale parallel processing, which can significantly suppress the random offsets and thus the optical linear loss. Here we demonstrate ultra-low loss photonic crystal waveguides with a multi-project wafer run through AIM photonics and post-processing. For sub-millimeter long photonic crystal waveguides, 2 dB total loss and 40 dB extinction ratio are observed across dies. Comment: 10 pages 4 figures. arXiv admin note: substantial text overlap with arXiv:2104.09293 |
| Databáze: | arXiv |
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