| Popis: |
Thin film deposition technologies boost the development of modern semiconductor industries. Being a fancy variant, vapor phase deposition on metal nanoparticles (often in liquid phase) rather than on bare substrates opens novel avenues of fabricating low-dimensional nanomaterials, which renders the development of new device architectures and their applications in advanced electronics, optoelectronics and photonics, etc. Since the last twenty years, nanomaterials with various geometries (i.e. dots, wires, trees, tubes, flakes, ribbons, etc.) have been synthesized via different bottom-up methods (i.e. vapor-liquid-solid, vapor-solid-solid, in plane solid-liquid-solid, etc.) by different deposition techniques (CVD, PECVD, MOCVD, MBE, etc.). In contrast with liquid phase epitaxy where metal liquid severs as stationary reservoir that accommodates gaseous precursors, metal droplets have to be kicked off in-plane on/out-of-plane from the substrates so as to steer the growth of low-dimensional nanomaterials. In this review, we shall regard the growth process in a viewpoint of dynamic droplet evolution under vapor phase deposition. We shall summarize several key factors that affect the droplet spreading behaviors and their consequent nanofluidic transport, which involves deposition parameters, solid-liquid interfaces, crystal phases, substrate nanofacets and so on, which deterministically results in various morphologies and growth directions of the nanomaterials. Reversely, the aspects like doping profile and phase transition that are strongly dependent on the droplet transport will also be discussed. |
