Multislice Electron Tomography using 4D-STEM
| Autor: | Lee, Juhyeok, Lee, Moosung, Park, YongKeun, Ophus, Colin, Yang, Yongsoo |
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| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | Phys. Rev. Applied 19, 054062 (2023) |
| Druh dokumentu: | Working Paper |
| DOI: | 10.1103/PhysRevApplied.19.054062 |
| Popis: | Electron tomography offers important three-dimensional (3D) structural information which cannot be observed by two-dimensional imaging. By combining annular dark field scanning transmission electron microscopy (ADF-STEM) with aberration correction, the resolution of electron tomography has reached atomic resolution. However, tomography based on ADF-STEM inherently suffers from several issues, including a high electron dose requirement, poor contrast for light elements, and artifacts from image contrast nonlinearity. Here, we developed a new method called MultiSlice Electron Tomography (MSET) based on 4D-STEM tilt series. Our simulations show that multislice-based 3D reconstruction can effectively reduce undesirable reconstruction artifacts from the nonlinear contrast, allowing precise determination of atomic structures with improved sensitivity for low-Z elements, at considerably low electron dose conditions. We expect that the MSET method can be applied to a wide variety of materials, including radiation-sensitive samples and materials containing light elements whose 3D atomic structures have never been fully elucidated due to electron dose limitations or nonlinear imaging contrast. Comment: 26 pages, 9 figures |
| Databáze: | arXiv |
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