| Autor: |
Kim, Joohoon, Seong, Junhwa, Kim, Wonjoong, Lee, Gun-Yeal, Kim, Hongyoon, Moon, Seong-Won, Jang, Jaehyuck, Kim, Yeseul, Yang, Younghwan, Oh, Dong Kyo, Park, Chanwoong, Choi, Hojung, Jeon, Hyeongjin, Lee, Kyung-Il, Lee, Byoungho, Lee, Heon, Rho, Junsuk |
| Rok vydání: |
2022 |
| Předmět: |
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| Druh dokumentu: |
Working Paper |
| Popis: |
Metalenses, which exhibit superior light-modulating performance with sub-micrometer-scale thicknesses, are suitable alternatives to conventional bulky refractive lenses. However, fabrication limitations, such as a high cost, low throughput, and small patterning area, hinder their mass production. Here, we demonstrate the mass production of low-cost, high-throughput, and large-aperture visible metalenses using an argon fluoride immersion scanner and wafer-scale nanoimprint lithography. Once a 12-inch master stamp is imprinted, hundreds of centimeter-scale metalenses can be fabricated. To enhance light confinement, the printed metasurface is thinly coated with a high-index film, resulting in drastic increase of conversion efficiency. As a proof of concept, a prototype of a virtual reality device with ultralow thickness is demonstrated with the fabricated metalens. |
| Databáze: |
arXiv |
| Externí odkaz: |
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