| Autor: |
Zhang, Aodong, Xu, Jian, Li, Yucen, Hu, Ming, Lin, Zijie, Song, Yunpeng, Qi, Jia, Chen, Wei, Liu, Zhaoxiang, Cheng, Ya |
| Rok vydání: |
2022 |
| Předmět: |
|
| Zdroj: |
Micromachines 2022, 13(4), 543 |
| Druh dokumentu: |
Working Paper |
| DOI: |
10.3390/mi13040543 |
| Popis: |
We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in-situ melting, for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. High-performance on-chip mixing and continuous-flow photochemical synthesis under UV LEDs irradiation at ~280 nm were demonstrated using the manufactured chip, indicating a powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis. |
| Databáze: |
arXiv |
| Externí odkaz: |
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