| Autor: |
Yurdakul, Celalettin, Millar, David S., Mansour, Hassan, Wang, Pu, Kojima, Keisuke, Koike-Akino, Toshiaki, Parsons, Kieran, Orlik, Philip V. |
| Rok vydání: |
2022 |
| Předmět: |
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| Druh dokumentu: |
Working Paper |
| Popis: |
We describe a method of low-coherence interferometry based optical profilometry using standard light-emitting diode (LED) illumination and complementary metal-oxide-semiconductor (CMOS) image sensors. A line-field illumination strategy allows for the simultaneous measurement of many points in space. Micron scale accuracy and resolution are achieved and demonstrated using a variety of targets. |
| Databáze: |
arXiv |
| Externí odkaz: |
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