Fabricacion de un magnetron sputtering para deposito de peliculas nanometricas magneticas
| Autor: | Dominguez, David Ley, Romero, Cesar O., Pirruccio, Giuseppe, Aguirre, Francisco Miguel Ascencio, Valencia, Ana Karla Bobadilla |
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| Jazyk: | Spanish; Castilian |
| Rok vydání: | 2021 |
| Předmět: | |
| Druh dokumentu: | Working Paper |
| Popis: | This paper presents the development of scientific instrumentation for the fabrication of ferromagnetic thin films, by sputtering technique, for the use of 2-inch-diameter targets. Thin films were deposited using Permalloy alloy (Ni80Fe20) as ferromagnetic material at room temperature on Si (001) substrates. The film thicknesses were measured with profilometry and a deposition rate for this alloy of 16.2 nm/min was calculated. Scanning electron microscopy showed a continuous film formation and a chemical composition similar to the target Comment: 7 pages, in Spanish, 8 figures, 1 table |
| Databáze: | arXiv |
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