MEMS Magnetometer Using Magnetic Flux Concentrators and Permanent Magnets
| Autor: | Maspero, Federico, Gatani, Gabriele, Cuccurullo, Simone, Bertacco, Riccardo |
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| Rok vydání: | 2021 |
| Předmět: | |
| Zdroj: | 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Druh dokumentu: | Working Paper |
| DOI: | 10.1109/MEMS51782.2021.9375441 |
| Popis: | A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low power consumption and high performance. The analytical model and the characterization of the first proof-concept device are presented. Comment: Accepted version of the paper |
| Databáze: | arXiv |
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