Giant enhancement in the thermal responsivity of microelectromechanical resonators by internal mode coupling

Autor:	Zhang, Ya, Kondo, Ryoka, Qiu, Boqi, Liu, Xin, Hirakawa, Kazuhiko
Rok vydání:	2020
Předmět:	Condensed Matter - Mesoscale and Nanoscale Physics Physics - Instrumentation and Detectors
Druh dokumentu:	Working Paper
DOI:	10.1103/PhysRevApplied.14.014019
Popis:	We report on a giant enhancement in the thermal responsivity of the doubly-clamped GaAs microelectromechanical (MEMS) beam resonators by using the internal mode coupling effect. This is achieved by coupling the fundamental bending mode with the fundamental torsional mode of the MEMS beam resonators through the cubic Duffing nonlinearity. In the mode coupling regime, we have found that, when the input heat to the MEMS resonators is modulated at a particular frequency, the resonance frequency shift caused by heating can be enhanced by almost two orders of magnitude. The observed effect is promising for realizing high-sensitivity thermal sensing by using MEMS resonators, such as ultrasensitive terahertz detection at room temperature. Comment: 5 figures
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/2003.10119 Zobrazit plný text záznamu View this record from Arxiv