Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers
| Autor: | Fan, Xuge, Forsberg, Fredrik, Smith, Anderson D., Schröder, Stephan, Wagner, Stefan, Rödjegård, Henrik, Fischer, Andreas C., Östling, Mikael, Lemme, Max C., Niklaus, Frank |
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| Rok vydání: | 2020 |
| Předmět: | |
| Druh dokumentu: | Working Paper |
| DOI: | 10.1038/s41928-019-0287-1 |
| Popis: | Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next generation mobile, wearable, and implantable devices. However, these NEMS devices require transducers that are ultra-small, sensitive and can be fabricated at low cost. Here, we show that suspended double-layer graphene ribbons with attached silicon proof masses can be used as combined spring-mass and piezoresistive transducers. The transducers, which are realized using processes that are compatible with large-scale semiconductor manufacturing technologies, can yield NEMS accelerometers that occupy at least two orders of magnitude smaller die area than conventional state-of-the-art silicon accelerometers. Comment: 42 pages, 4 figures |
| Databáze: | arXiv |
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