Lithographically defined site-selective growth of Fe filled multi-walled carbon nanotubes using a modified photoresist

Autor:	Sengupta, Joydip, Jana, Avijit, Singh, N. D. Pradeep, Jacob, Chacko
Rok vydání:	2019
Předmět:	Physics - Applied Physics Condensed Matter - Materials Science
Zdroj:	Carbon, Volume 48, Issue 8, July 2010, Pages 2371-2375
Druh dokumentu:	Working Paper
DOI:	10.1016/j.carbon.2010.02.036
Popis:	Partially Fe filled multi-walled carbon nanotubes (MWCNTs) were grown by chemical vapor deposition with propane at 850 {\deg}C using a simple mixture of iron (III) acetylacetonate (Fe(acac)3) powder and conventional photoresist. Scanning electron microscopy revealed that catalytic nanoparticles with an average diameter of 70 nm are formed on the Si substrate which governs the diameter of the MWCNTs. Transmission electron microscopy shows that the nanotubes have a multi-walled structure with partial Fe filling. A site-selective growth of partially Fe filled MWCNTs is achieved by a simple photolithographic route. Comment: Filled CNT, CVD, Partial filling, Photolithography
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/1908.02450 Zobrazit plný text záznamu View this record from Arxiv