High quality factor mechanical resonance in a silicon nanowire
| Autor: | Presnov, D. E., Kafanov, S., Dorofeev, A. A., Bozhev, I. V., Trifonov, A. S., Pashkin, Yu. A., Krupenin, V. A. |
|---|---|
| Rok vydání: | 2018 |
| Předmět: | |
| Druh dokumentu: | Working Paper |
| DOI: | 10.1134/S0021364018190037 |
| Popis: | Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the fundamental mode were measured at a temperature of $20\,\mathrm{mK}$ for nanowires of various sizes using the magnetomotive scheme. The measured values of the resonance frequency agree with the estimates obtained from the Euler-Bernoulli theory. The measured internal quality factor of the $5\,\mathrm{\mu m}$-long resonator, $3.62\times10^4$, exceeds the corresponding values of similar resonators investigated at higher temperatures. The structures presented can be used as mass sensors with an expected sensitivity $\sim 6 \times 10^{-20}\,\mathrm{g}\,\mathrm{Hz}^{-1/2}$. Comment: 6 pages: 6 figures |
| Databáze: | arXiv |
| Externí odkaz: |
|