Stoichiometry determination of chalcogenide superlattices by means of X-ray diffraction and its limits

Autor:	Hollermann, Henning, Lange, Felix Rolf Lutz, Jakobs, Stefan, Kerres, Peter, Wuttig, Matthias
Rok vydání:	2018
Předmět:	Condensed Matter - Materials Science
Druh dokumentu:	Working Paper
DOI:	10.1002/pssr.201800577
Popis:	In this paper we explore the potential of stoichiometry determination for chalcogenide superlattices, promising candidates for next-generation phase-change memory, via X-ray diffraction. To this end, a set of epitaxial GeTe/Sb2Te3 superlattice samples with varying layer thicknesses is sputter-deposited. Kinematical scattering theory is employed to link the average composition with the diffraction features. The observed lattice constants of the superlattice reference unit cell follow Vegard's law, enabling a straight-forward and non-destructive stoichiometry determination. Comment: physica status solidi (RRL) - Rapid Research Letters (2019)
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/1807.02829 Zobrazit plný text záznamu View this record from Arxiv