Toward Ka Band Acoustics: Lithium Niobate Asymmetrical Mode Piezoelectric MEMS Resonators

Autor:	Yang, Yansong, Lu, Ruochen, Manzaneque, Tomas, Gong, Songbin
Rok vydání:	2018
Předmět:	Physics - Applied Physics Electrical Engineering and Systems Science - Signal Processing
Druh dokumentu:	Working Paper
DOI:	10.1109/FCS.2018.8597475
Popis:	This work presents a new class of micro-electro-mechanical system (MEMS) resonators toward Ka band (26.5-40GHz) for fifth-generation (5G) wireless communication. Resonant frequencies of 21.4 and 29.9 GHz have been achieved using the fifth and seventh order asymmetric (A5 and A7) Lamb-wave modes in a suspended Z-cut lithium niobate (LiNbO3) thin film. The fabricated device has demonstrated an electromechanical coupling (kt2) of 1.5% and 0.94% and extracted mechanical Qs of 406 and 474 for A5 and A7 respectively. The quality factors are the highest reported for piezoelectric MEMS resonators operating at this frequency range. The demonstrated performance has shown the strong potential of LiNbO3 asymmetric mode devices to meet the front-end filtering requirements of 5G. Comment: 5 pages, 7 figures, 2018 IEEE International Frequency Control Symposium
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/1805.11207 Zobrazit plný text záznamu View this record from Arxiv