Laser-to-droplet alignment sensitivity relevant for laser-produced plasma sources of extreme ultraviolet light

Autor:	Reijers, Sten A., Kurilovich, Dmitry, Torretti, Francesco, Gelderblom, Hanneke, Versolato, Oscar O.
Rok vydání:	2018
Předmět:	Physics - Applied Physics
Zdroj:	Journal of Applied Physics 124, 013102 (2018)
Druh dokumentu:	Working Paper
DOI:	10.1063/1.5026950
Popis:	We present and experimentally validate a model describing the sensitivity of the tilt angle, expansion and propulsion velocity of a tin micro-droplet irradiated by a 1 {\mu}m Nd:YAG laser pulse to its relative alignment. This sensitivity is particularly relevant in industrial plasma sources of extreme ultraviolet light for nanolithographic applications. Our model has but a single parameter: the dimensionless ratio of the laser spot size to the effective size of the droplet, which is related to the position of the plasma critical density surface. Our model enables the development of straightforward scaling arguments in turn enabling precise control the alignment sensitivity. Comment: 7 pages, 5 figures
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/1805.05647 Zobrazit plný text záznamu View this record from Arxiv