Micromechanical microphone using sideband modulation of nonlinear resonators
| Autor: | Boales, Joseph A., Mateen, Farrukh, Mohanty, Pritiraj |
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| Rok vydání: | 2017 |
| Předmět: | |
| Zdroj: | Appl. Phys. Lett. 111, 093504 (2017) |
| Druh dokumentu: | Working Paper |
| DOI: | 10.1063/1.4996993 |
| Popis: | We report the successful detection of an audio signal via sideband modulation of a nonlinear piezoelectric micromechanical resonator. The 270$\times$96-$\mu$m resonator was shown to be reliable in audio detection for sound intensity levels as low as ambient room noise and to have an unamplified sensitivity of 23.9 $\mu$V/Pa. Such an approach may be adapted in acoustic sensors and microphones for consumer electronics or medical equipment such as hearing aids. Comment: 5 pages, 3 figures |
| Databáze: | arXiv |
| Externí odkaz: |
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