Electron neutral collision frequency measurement with the hairpin resonator probe

Autor:	Peterson, David J, Kraus, Philip, Chua, Thai Cheng, Larson, Lynda, Shannon, Steven C
Rok vydání:	2017
Předmět:	Physics - Plasma Physics
Zdroj:	2017 Plasma Sources Sci. Technol. 26 095002
Druh dokumentu:	Working Paper
DOI:	10.1088/1361-6595/aa80fa
Popis:	Electron neutral collision frequency is measured using both grounded and floating hairpin resonator probes in a 27 MHz parallel plate capacitively coupled plasma (CCP). Operating conditions are 0.1-2 Torr (13.3-267 Pa) in Ar, He, and Ar-He gas mixtures. The method treats the hairpin probe as a two wire transmission line immersed in a dielectric medium. A minimization method is applied during the pressure and sheath correction process by sweeping over assumed collision frequencies in order to obtain the measured collision frequency. Results are compared to hybrid plasma equipment module (HPEM) simulations and show good agreement. Comment: 8 pages, 7 figures, Submitted to Plasma Sources Science and Technology
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/1703.09334 Zobrazit plný text záznamu View this record from Arxiv