Infrared vertically-illuminated photodiode for chip alignment feedback
| Autor: | Alloatti, Luca, Ram, Rajeev Jagga |
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| Rok vydání: | 2016 |
| Předmět: | |
| Zdroj: | AIP Advances 6, 85219 (2016) |
| Druh dokumentu: | Working Paper |
| DOI: | 10.1063/1.4961949 |
| Popis: | We report on vertically-illuminated photodiodes fabricated in the GlobalFoundries 45nm 12SOI node and on a packaging concept for optically-interconnected chips. The photodiodes are responsive at 1180 nm, a wavelength currently used in chip-to-chip communications. They have further a wide field-of-view which enables chip-to-board positional feedback in chip-board assemblies. Monolithic integration enables on-chip processing of the positional data. Comment: 7 pages, 4 figures |
| Databáze: | arXiv |
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