RF plasma cleaning of optical surfaces: A study of cleaning rates on different carbon allotropes as a function of RF powers and distances

Autor:	Cuxart, M. González, Reyes-Herrera, J., Šics, I., Goñi, A. R., Fernandez, H. Moreno, Carlino, V., Pellegrin, E.
Rok vydání:	2015
Předmět:	Physics - Instrumentation and Detectors Physics - Optics Physics - Plasma Physics
Druh dokumentu:	Working Paper
DOI:	10.1016/j.apsusc.2015.11.117
Popis:	An extended study on an advanced method for the cleaning of carbon contaminations on large optical surfaces using a remote inductively coupled low pressure RF plasma source (GV10x downstream asher) is reported in this work. Technical as well as scientific features of this scaled up cleaning process are analyzed, such as the cleaning efficiency for different carbon allotropes (amorphous and diamond-like carbon) as a function of feedstock gas composition, RF power (ranging from 30 to 300W), and source-object distances (415 to 840 mm). The underlying physical phenomena for these functional dependences are discussed. Comment: 16 pages, 9 figures
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/1506.04280 Zobrazit plný text záznamu View this record from Arxiv