Linear and nonlinear capacitive coupling of electro-opto-mechanical photonic crystal cavities
| Autor: | Pitanti, Alessandro, Fink, Johannes M., Safavi-Naeini, Amir H., Lei, Chan U., Hill, Jeff T., Tredicucci, Alessandro, Painter, Oskar |
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| Rok vydání: | 2014 |
| Předmět: | |
| Druh dokumentu: | Working Paper |
| Popis: | We fabricate and characterize a microscale silicon electro-opto-mechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining a silicon surface quality necessary for minimizing optical loss. Using the sensitive optical read-out of the photonic crystal cavity, we characterize the linear and nonlinear capacitive coupling to the fundamental 63 MHz in-plane flexural motion of the structure, showing that the large electromechanical coupling in such devices may be suitable for realizing efficient microwave-to-optical signal conversion. Comment: 8 papers, 4 figures |
| Databáze: | arXiv |
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