Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India
Autor: | Aziz, T., Chendvankar, S. R., Mohanty, G. B., Patil, M. R., Rao, K. K., Rani, Y. R., Rao, Y. P. P., Behnamian, H., Mersi, S., Naseri, M. |
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Rok vydání: | 2014 |
Předmět: | |
Zdroj: | JINST 9 (2014) P06008 |
Druh dokumentu: | Working Paper |
DOI: | 10.1088/1748-0221/9/06/P06008 |
Popis: | This paper reports the design, fabrication and characterization of single-sided silicon microstrip sensors with integrated biasing resistors and coupling capacitors, produced for the first time in India. We have first developed a prototype sensor on a four-inch wafer. After finding suitable test procedures for characterizing these AC coupled sensors, we have fine-tuned various process parameters in order to produce sensors with the desired specifications. Comment: 10 pages, 11 figures, 1 table, to appear in JINST |
Databáze: | arXiv |
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