Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India

Autor: Aziz, T., Chendvankar, S. R., Mohanty, G. B., Patil, M. R., Rao, K. K., Rani, Y. R., Rao, Y. P. P., Behnamian, H., Mersi, S., Naseri, M.
Rok vydání: 2014
Předmět:
Zdroj: JINST 9 (2014) P06008
Druh dokumentu: Working Paper
DOI: 10.1088/1748-0221/9/06/P06008
Popis: This paper reports the design, fabrication and characterization of single-sided silicon microstrip sensors with integrated biasing resistors and coupling capacitors, produced for the first time in India. We have first developed a prototype sensor on a four-inch wafer. After finding suitable test procedures for characterizing these AC coupled sensors, we have fine-tuned various process parameters in order to produce sensors with the desired specifications.
Comment: 10 pages, 11 figures, 1 table, to appear in JINST
Databáze: arXiv