Micromanipulation transfer of membrane resonators for circuit optomechanics

Autor:	Berdova, Maria, Cho, Sung Un, Pirkkalainen, Juha-Matti, Sulkko, Jaakko, Song, Xuefeng, Hakonen, Pertti J., Sillanpaa, Mika A.
Rok vydání:	2013
Předmět:	Condensed Matter - Mesoscale and Nanoscale Physics
Zdroj:	Journal of Micromechanics and Microengineering, 23, 125024 (2013)
Druh dokumentu:	Working Paper
DOI:	10.1088/0960-1317/23/12/125024
Popis:	A capacitive coupling between mechanical resonator and a microwave cavity enables readout and manipulation of the vibrations. We present a setup to carry out such experiments with aluminum membranes fabricated as stamps and transferred in place with micromanipulation. The membrane is held in place by van der Waals forces, and is supported by three microscopic points. We measure the lowest mechanical modes, and conclude the membrane vibrates as an essentially free-free resonator. Sliding clamping conditions are identified via a softening Duffing nonlinearity. The method will enable reduction of clamping losses, while maintaining a narrow vacuum gap for strong capacitive coupling. Comment: 4 pages
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/1307.1619 Zobrazit plný text záznamu View this record from Arxiv