Fabrication of high quality sub-micron Au gratings over large areas with pulsed laser interference lithography for SPR sensors

Autor:	Arriola, Alexander, Rodriguez, Ainara, Perez, Noemi, Tavera, Txaber, Withford, Michael J., Fuerbach, Alexander, Olaizola, Santiago M.
Rok vydání:	2013
Předmět:	Physics - Optics
Zdroj:	Optical Materials Express, Vol. 2, Issue 11, pp. 1571-1579 (2012)
Druh dokumentu:	Working Paper
DOI:	10.1364/OME.2.001571
Popis:	Metallic gratings were fabricated using high energy laser interference lithography with a frequency tripled Nd:YAG nanosecond laser. The grating structures were first recorded in a photosensitive layer and afterwards transferred to an Au film. High quality Au gratings with a period of 770 nm and peak-to-valley heights of 20-60 nm exhibiting plasmonic resonance response were successfully designed, fabricated and characterized. Comment: 10 pages, 7 figures
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/1302.2660 Zobrazit plný text záznamu View this record from Arxiv