Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics

Autor:	Kalinushkin, V. P., Yuryev, V. A., Astafiev, O. V., Buzynin, A. N., Bletskan, N. I.
Rok vydání:	2011
Předmět:	Condensed Matter - Materials Science Physics - Optics
Zdroj:	MRS Symp. Proc., 378 (1995) 615-620
Druh dokumentu:	Working Paper
DOI:	10.1557/PROC-378-615
Popis:	Some possible applications of the low-angle mid-IR-light scattering technique and some recently developed on its basis methods for non-destructive inspection and investigation of semiconductor materials and structures are discussed in the paper. The conclusion is made that the techniques in question might be very useful for solving a large number of problems regarding defect investigations and quality monitoring both in research laboratories and the industry of microelectronics Comment: MRS Spring Meeting, San Francisco, USA, 17-21 April 1995
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/1106.1327 Zobrazit plný text záznamu View this record from Arxiv