Direct metal nano-imprinting using embossed solid electrolyte stamp

Autor:	Kumar, A, Hsu, K H, Jacobs, K E, Ferreira, P M, Fang, N X
Rok vydání:	2011
Předmět:	Condensed Matter - Mesoscale and Nanoscale Physics Condensed Matter - Materials Science
Druh dokumentu:	Working Paper
DOI:	10.1088/0957-4484/22/15/155302
Popis:	In this paper, we report direct patterning of metal nanostructures using an embossed solid electrochemical stamp. Microforming of solid superionic stamps using Si templates-analogous to polymer patterning in nano-imprint lithography-is explored. Silver sulfide (Ag2S)-a superionic conductor with excellent micro-forming properties-is investigated as a candidate material. Important parameters of the superionic stamp, including mechanical behavior, material flow during forming, and feature recovery after embossing are studied. Excellent feature transferability during embossing as well as etching is observed. To illustrate the capability of this approach silver nano-antennas with gaps <10 nm were successfully fabricated. The possibility for large area patterning with stamp diameters >6 mm is also demonstrated. Embossing based metal patterning allows fabrication beyond two-dimensional nanofabrication and several patterning schemes are reported. Comment: 11 pages (double spaced), 7 figures, 1 table, continuation of work submitted to MRS Spring 2009
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/1102.1945 Zobrazit plný text záznamu View this record from Arxiv