Influence of random roughness on cantilever curvature sensitivity
| Autor: | Ergincan, O., Palasantzas, G., Kooi, B. J. |
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| Rok vydání: | 2010 |
| Předmět: | |
| Druh dokumentu: | Working Paper |
| DOI: | 10.1063/1.3299713 |
| Popis: | In this work we explore the influence of random surface roughness on the cantilever sensitivity to respond to curvature changes induced by changes in surface stress. The roughness is characterized by the out-of-plane roughness amplitude w, the lateral correlation length x, and the roughness or Hurst exponent H (0 |
| Databáze: | arXiv |
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