Hot Roller Embossing for the Creation of Microfluidic Devices

Autor:	Ng, Sum Huan, Wang, Zhenfeng
Rok vydání:	2008
Předmět:	Computer Science - Other Computer Science
Zdroj:	Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
Druh dokumentu:	Working Paper
Popis:	We report on the hot roller embossing of polymer sheets for the creation of microfluidic structures. Measurements conducted on 100 $\mu$m features showed that the lateral dimensions could be replicated to within 2% tolerance, while over 85% of mould depth was embossed. Feature sizes down to 50 $\mu$m and feature depths up to 30 $\mu$m had been achieved. At lower temperatures, asymmetric pile up of polymer material outside embossed regions was observed with higher pile up occurring on the trailing side of the embossed regions. Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/0805.0887 Zobrazit plný text záznamu View this record from Arxiv