Architecture for Integrated Mems Resonators Quality Factor Measurement

Autor:	Mathias, H., Parrain, F., Gilles, J. -P., Megherbi, S., Zhang, M., Coste, Ph., Dupret, A.
Rok vydání:	2008
Předmět:	Computer Science - Other Computer Science
Zdroj:	Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
Druh dokumentu:	Working Paper
Popis:	In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (Q > 100). Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/0802.3767 Zobrazit plný text záznamu View this record from Arxiv